Supply 1, the technical characteristics of a system of pipes use different specifications of large diameter stainless steel tube, to ensure sufficient flow guide systems;. B inner pipe surface degreasing systems, oil and electric polishing process to ensure that the minimum amount of gas and gas molecules resistance; c main body of each tube is sealed with high vacuum flange sealing, some parts of fluorine rubber seal;. labor intensity and operating system with a cold trap d and electrical movable flapper valve, button control, reduced operation. error rate;. e device is a monolith module and two split module design structure, to achieve roughing and pumping overall portfolio or their independent work in two ways, so as to multiple Tank alternating different process might bring ;. f the system no-load operation, the end of the main line of vacuum degree ≥ 6.5 × 10-5Pa;. g system overall leak rate ≤ 8 × 10-10Pa m3 / s;?. h compact overall system design structure, in line with the vacuum field " short, thick, straight "design principle, achieve optimal efficiency of the system. 2, the main equipment components a vacuum unit United States Agilent (Agilent) VHS series diffusion pump or a molecular pump;.. B electronic control system unit inlet pressure control pump start-up, high-pressure transmission line entry, control unit and each pump start-up sequence, diffusion pump control, vacuum unit and vacuum pump to maintain conversion, current and voltage independent display. Overload protection with emergency stop button, electric control box spray. Schneider master control system components, domestic intelligence complex vacuum gauge, to achieve manually open mechanical pumps, Roots pumps, diffusion pumps and associated valves, vacuum gauges show a vacuum degree of vacuum systems and different positions. Each load current are digital display. System main valve and bypass valve interlock, pre-valve and the bypass valve interlock, Roots pump fail to start the vacuum degree can not be opened. c nitrogen purged with nitrogen replacement system is a standalone movable modular design, in order to observe and use;. replaced with nitrogen pressure and temperature according to production needs can be appropriately adjusted. d. in the heating system and temperature control system circulation tank heating system is heated to a temperature of 120 ℃ -150 ℃, the return air temperature 100-120 ℃ (according to the customer the choice of different wrapping material temperature capabilities of this heating system can be heated to 350 ℃), to provide continuous uninterrupted interior circulating hot air, active auxiliary tank liner attached to the outer wall of the water molecules, hot air circulation function ensures that the heating power to a minimum. 3, the process outlined a helium leak after the tank qualified to move the tank to keep on sandwich vacuum evacuation system stations; b the mezzanine interface vacuum tank connected to the system (to ensure connection tightness). and leak detection;. c hydronic heating system is connected to the inner tank liner, high temperature hot air from the inlet pipe at the bottom of the tank, put into the trachea, from out of the tube at the top of the tank, pressurized pipe emissions (based on customer tank body piping layout, the interior heating do adjust inlet and outlet connections);. d at the same time connect the mezzanine nitrogen purging vacuum hose to the main line for nitrogen replacement preparation; e start Roots rotary vane. unit, for pre-vacuum tank sandwich;. f Open nitrogen valve replacement performed dissection of the body flushed with nitrogen gas substitution;. g Repeat e, f two steps 9-10 times, and the recording process cycle data; h. nitrogen replacement process is completed, do intermittent evacuation process, until the end of the whole process.